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150 mm Reticle SMIF Pods

The 150 mm reticle SMIF pod is an advanced reticle handling system providing superior performance during storage and transport.

  • Class 1 internal environment
  • Automation compatibility
  • Standard – RSP1
  • Purged pod – RSP2
  • Purged and purified pod – RSP3
  • Multiple ESD paths to ground
  • Easy to clean and maintain
  • Secure reticle retention allows transport as well as storage
  • 150 mm SMIF interface
  • Read More Read Less
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