Caerus™ 100 Series Coatings
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- Semiconductor chamber components
- Optical coatings
- Parts with high aspect ratio features and complex 3-dimensional surfaces
Specifications
| Substrate: | Compatibility: Metals, Ceramics (e.g., Alumina, AIN) and Semiconductors |
| Size: Up to 1016 mm D x 508 mm H (40" D x 20" H) | |
| Structure: | Microcrystalline |
| Temperature: | Deposition: 200°C (392°F) |
| Use: 1000°C (1832°F) | |
| Coating thickness: | Up to 10 μm |
| Electrical resistivity: | >10-12 Ω-cm |
| Purity: | >99% |
| Hardness: | 1100 HV |
| Elastic modulus: | 190 GPa |
| Roughness: | Conformal - substrate dependent |
| Corrosion resistance: | Excellent etch resistance in fluorine environments |
| Oxidation resistant up to 1000°C (1832°F) in air | |
| Resistant to most acids and alkalis |
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